| Cleaning method of semiconductor wafer |
2022-10-06 |
2022-12-06 |
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| Substrate processing apparatus and method |
2022-9-23 |
2023-4-04 |
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| Thin film deposition device, thin film deposition method and thin film … |
2022-9-01 |
2023-3-03 |
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| Electroplating apparatus |
2022-7-22 |
2023-3-23 |
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| Substrate treatment method |
2022-7-22 |
2023-3-16 |
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| Flipping apparatus |
2022-6-17 |
2023-1-19 |
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| Electroplating device and electroplating method for non-circular substrate |
2022-6-06 |
2022-12-29 |
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| Substrate treatment apparatus |
2022-5-20 |
2022-12-15 |
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| Deviation measurement device |
2022-5-20 |
2022-12-22 |
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| Electroplating device and electroplating method |
2022-4-28 |
2022-12-15 |
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| Method and apparatus for cleaning semiconductor wafer |
2022-4-20 |
2022-8-04 |
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| Methods and apparatus for cleaning semiconductor wafers |
2022-1-13 |
2022-5-05 |
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| Cup-shaped chuck of substrate holding device, and substrate holding device |
2021-12-17 |
2022-7-01 |
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| Electroplating apparatus and electroplating method |
2021-12-17 |
2022-8-16 |
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| Plating apparatus and plating method |
2021-10-29 |
2022-6-02 |
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| Wafer clamping device |
2021-9-30 |
2023-3-31 |
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| Substrate chuck device |
2021-9-30 |
2023-4-04 |
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| Substrate processing apparatus |
2021-9-29 |
2023-3-31 |
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| Substrate processing apparatus and method |
2021-9-24 |
2023-3-30 |
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| System for cleaning semiconductor wafers |
2021-9-09 |
2021-12-30 |
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| Substrate cleaning equipment and chamber isolation device thereof |
2021-9-09 |
2023-3-14 |
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| Thin film deposition apparatus, method and device |
2021-9-02 |
2023-3-09 |
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| Coating and developing apparatus |
2021-8-20 |
2023-4-04 |
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| Method for processing wafer by using furnace tube |
2021-8-20 |
2023-2-21 |
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| Coating and developing device |
2021-8-20 |
2023-2-23 |
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| Supercritical fluid-based drying device and method |
2021-8-09 |
2023-2-17 |
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| Drying apparatus and method based on supercritical fluid |
2021-8-09 |
2023-2-16 |
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| Semiconductor wafer cleaner and cleaning method |
2021-8-06 |
2021-11-11 |
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| Methods and apparatus for cleaning substrates |
2021-7-16 |
2022-2-03 |
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| Methods and apparatus for cleaning substrates |
2021-6-14 |
2022-2-03 |
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| Wafer heating device |
2021-6-11 |
2022-12-13 |
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| Method for removing barrier layer |
2021-6-08 |
2022-4-01 |
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| Substrate processing apparatus |
2021-4-25 |
2022-11-03 |
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| Method and apparatus for removing particles or photoresist on substrates |
2021-4-21 |
2021-12-16 |
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| Method and apparatus for cleaning substrates using high temperature chemicals … |
2021-4-19 |
2021-8-05 |
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| Method and apparatus for uniformly metallization on substrate |
2021-2-01 |
2023-4-18 |
2023-4-18 |
| Method and apparatus for uniformly metallization on substrate |
2021-2-01 |
2021-5-27 |
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| Plating apparatus and plating method |
2021-1-15 |
2021-10-01 |
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| Methods and system for cleaning semiconductor wafers |
2021-1-04 |
2021-4-29 |
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| Substrate support device capable of preventing processing fluid from reaching … |
2020-12-30 |
2022-7-01 |
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| Glue spreader and process chamber thereof |
2020-12-23 |
2022-6-24 |
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| Wafer supporting device |
2020-12-18 |
2022-6-21 |
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| Substrate supporting apparatus |
2020-12-16 |
2022-6-23 |
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| Clamping device |
2020-12-14 |
2022-6-14 |
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| Clamping device |
2020-12-14 |
2022-6-14 |
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| Electroplating apparatus and method capable of performing electroplating on … |
2020-11-26 |
2022-6-01 |
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| Substrate cleaning method and apparatus |
2020-10-30 |
2021-5-16 |
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| Coater with automatic cleaning function and coater automatic cleaning method |
2020-10-26 |
2021-3-11 |
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| Functional water producing apparatus and functional water producing method |
2020-4-07 |
2020-11-12 |
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| Rotating shaft and substrate supporting device including the same capable of … |
2019-12-31 |
2021-7-16 |
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| Electrochemical polishing solution recovery device and method |
2019-12-31 |
2021-7-16 |
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| Exhaust device |
2019-12-31 |
2021-7-16 |
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| Electroplating apparatus |
2019-12-31 |
2021-7-16 |
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| Rotary spray head, cleaning equipment and cleaning method |
2019-12-31 |
2021-7-16 |
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| Pre-wetting method before electroplating |
2019-12-31 |
2021-7-16 |
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| Filtering liquid storage device |
2019-12-31 |
2021-7-16 |
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| Pipeline connecting structure |
2019-12-31 |
2021-7-16 |
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| Disassembling tool |
2019-12-31 |
2021-7-16 |
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| Semiconductor cleaning device and brush head pressure feedback adjusting … |
2019-12-31 |
2021-7-16 |
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| Wafer chuck |
2019-12-31 |
2021-7-16 |
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| Gold plating sealing device |
2019-12-31 |
2021-7-16 |
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| Electroplating device and electroplating method |
2019-12-31 |
2021-7-16 |
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| Wafer liquid supply device |
2019-12-31 |
2021-7-16 |
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| Shaft sealing structure and semiconductor device |
2019-12-31 |
2021-7-16 |
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| Wafer positioning device and method |
2019-12-30 |
2021-7-16 |
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| Wafer clamping device |
2019-12-30 |
2021-7-16 |
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| Processing method and cleaning device for semiconductor structure |
2019-12-30 |
2021-7-02 |
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| Seal detection device and method |
2019-12-30 |
2021-7-16 |
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| Plating apparatus and plating method |
2019-12-27 |
2021-7-01 |
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| Electroplating solution reflux device and electroplating device |
2019-12-25 |
2021-6-25 |
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| Photoresist removing method and device |
2019-12-25 |
2021-6-25 |
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| Sampling device |
2019-12-25 |
2021-6-25 |
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| Semiconductor device with a plurality of semiconductor chips |
2019-12-23 |
2021-7-09 |
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| Substrate cleaning method |
2019-12-16 |
2020-3-12 |
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| Steam generating device |
2019-12-11 |
2021-6-11 |
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| Double-head nozzle structure, cleaning equipment and cleaning method |
2019-12-10 |
2021-6-11 |
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| Semiconductor packaging structure and packaging method |
2019-12-09 |
2021-6-25 |
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| Apparatus and method for cleaning semiconductor wafers |
2019-12-06 |
2021-6-16 |
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| Ion exchange membrane fixing device and electroplating device |
2019-12-06 |
2021-6-08 |
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| Chemical liquid supply device and semiconductor equipment |
2019-12-03 |
2021-6-04 |
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| Rotating shaft and substrate supporting device comprising same |
2019-11-08 |
2021-5-11 |
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| Static conductive substrate holding device |
2019-11-08 |
2021-5-11 |
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| Electroplating apparatus and cleaning method |
2019-11-06 |
2021-5-11 |
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| Wet etching method of semiconductor substrate |
2019-9-19 |
2021-3-19 |
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| Wet etching method of semiconductor substrate |
2019-9-19 |
2021-3-19 |
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| Barrier layer removal method and semiconductor structure forming method |
2019-9-04 |
2019-12-26 |
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| Electroplating apparatus |
2019-8-23 |
2021-2-26 |
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| Cathode cavity |
2019-8-23 |
2021-2-26 |
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| Annealing chamber with isolating door plate |
2019-8-23 |
2021-2-26 |
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| Annealing chamber |
2019-8-23 |
2021-2-26 |
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| Air inlet device of annealing cavity |
2019-8-23 |
2021-2-26 |
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| Air inlet device of annealing cavity |
2019-8-23 |
2021-2-26 |
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| Plating solution diffusion baffle of electroplating cavity |
2019-8-23 |
2021-2-26 |
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| Edge washing device |
2019-8-23 |
2021-2-26 |
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| Methods and apparatus for cleaning substrates |
2019-7-19 |
2021-2-01 |
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| Methods and apparatus for cleaning substrates |
2019-7-19 |
2021-2-01 |
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| Method and apparatus for cleaning substrates |
2019-7-19 |
2021-2-01 |
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| Wafer drying device and method |
2019-6-18 |
2020-12-18 |
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| Electroplating apparatus and electroplating method |
2019-5-07 |
2020-1-16 |
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| Methods and apparatus for cleaning flip chip assemblies |
2019-4-19 |
2019-8-08 |
|