Latest Patents

Patents imply intellectual property and it has a $ value that can be associated depending on the field and type of patent that is allocated. Patents also increase the enterprise value of the company and help prevent copy-cats from copying the idea without having royalt payments or licencing deals. We like it when companies get patents awarded!. To protect IP companies aggressively file provisional patents even before they have a working product. The below table provides a way to look at what has been done by companies and use this as a factor to make investment decisions.

     
Title Filing Date Publication Date Grant Date
Phosphine complex gas for carbon injection 2022-7-06 2022-9-21
Hybrid high-temperature electrostatic clamp for improved workpiece temperature … 2021-11-11 2022-6-01
Fluorine based molecular co-gas when running dimethylaluminum chloride as a … 2021-11-01 2022-5-05
Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam 2021-9-10 2022-5-01
Active workpiece heating or cooling for an ion implantation system 2021-8-04 2021-11-25
Hydrogen co-gas when using a chlorine-based ion source material 2021-7-12 2022-3-03
Tuning apparatus for minimum divergence ion beam 2021-6-16 2022-1-01
Stepped indirectly heated cathode with improved shielding 2021-6-16 2022-2-10
Ion source repeller 2021-4-06 2022-10-06
Apparatus and method for metal contamination control in ion implantation … 2021-2-08 2022-9-13
Hydrogen generator for an ion implanter 2020-11-20 2022-3-15 2022-3-15
Method of enhancing the energy and beam current on rf based implanter 2020-8-18 2021-4-01
Toxic outgas control post process 2020-7-10 2021-5-16
System and method for extending a lifetime of an ion source for molecular … 2020-6-03 2021-4-01
Charge stripping for ion implantation systems 2020-5-29 2020-12-03
High power wafer cooling 2020-4-30 2022-7-06
Ion source with multiple arc chambers 2020-4-16 2022-6-23
Liquid metal ion source 2020-3-20 2021-3-01
A method of mixing upstream and downstream current measurements for inference … 2020-2-17 2020-8-20
Scan and corrector magnet designs for high throughput scanned beam ion … 2019-12-19 2021-6-15 2021-6-15
Reduction of condensed gases on chamber walls via purge gas dilution and … 2019-12-10 2021-1-01
Reduction of condensed gases on chamber walls via heated chamber housing for … 2019-12-09 2020-12-16
Tetrode extraction apparatus for ion source 2019-12-04 2020-11-16
Wafer soak temperature readback and control via thermocouple embedded end … 2019-11-18 2020-10-16
Ion source with tailored extraction aperture 2019-11-12 2020-10-01
A system and method of arc detection using dynamic threshold 2019-11-11 2020-7-01
Extraction electrode assembly voltage modulation in ion implantation system 2019-10-18 2020-2-13
System and method for aligning light-transmitting birefringent workpieces 2019-8-23 2020-3-05
Substrate support having customizable and replaceable features for enhanced … 2019-8-23 2021-9-07 2021-9-07
Scanning magnet design for improved efficiency 2019-8-21 2021-4-26
Hydrogen gas venting for ion source housing 2019-5-13 2020-12-18
In-situ wafer temperature measurement and control 2019-4-01 2020-12-09
Outgassing affecting process chamber reduction through chamber pump and purge 2019-1-30 2020-10-06
Method for decreasing cool down time with heated system for semiconductor … 2018-12-21 2020-6-25
Method of providing consistent electrostatic clamping through real-time control … 2018-12-04 2020-7-29
Film stabilization through novel materials modification of beamline components 2018-11-16 2019-5-16
Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner … 2018-10-25 2019-7-16
Systems and methods for stabilizing or removing instantaneous beamline film in … 2018-10-09 2020-6-11
Wafer temperature control with consideration to beam power input 2018-9-19 2020-4-01
Wafer temperature control with control over beam power input 2018-9-18 2020-11-26
RF resonator for ion beam acceleration 2018-9-12 2019-6-16
Lanthanated tungsten ion source and beamline components 2018-8-14 2020-1-14 2020-1-14
Low conductance self-shielding insulator for ion implantation systems 2018-8-10 2018-12-06
Ion implantation system with beam angle control in offset and deceleration … 2018-6-15 2019-2-01
Method and ion implantation system for correcting an implantation angle in an … 2018-6-13 2022-10-17 2022-10-17
Hydrogen co-adhesive gas when using aluminum iodide as the ion source material 2018-6-05 2019-3-01
Wafer cooling system and method 2018-4-12 2019-9-03 2019-9-03
Two-axis variable width mass resolving aperture with fast acting shutter motion 2018-3-01 2019-8-27 2019-8-27
The pre- soaking of radiant heating 2018-1-18 2019-9-13
Phosphorous trifluoride co-gas for carbon implants 2017-11-21 2018-10-01
Adjustable circumference electrostatic clamp 2017-9-30 2018-5-01
In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge … 2017-9-29 2018-6-16
Integrated emissivity sensor alignment characterization 2017-9-21 2018-6-01
An ion implantation system and a gripper mechanism for individually gripping a … 2017-9-21 2022-3-01 2022-3-01
Ion implantation systems and methods for controlling ion beam uniformity 2017-9-07 2022-4-01 2022-4-01
System and method for heated ion implantation achieving high processing … 2017-7-03 2017-12-21
In situ cleaning of aluminum iodide-related by-products and injection using … 2017-6-21 2019-3-05
Improved ion source repeller shield 2017-4-05 2018-1-01
Improved ion source cathode shield 2017-1-19 2020-12-16 2020-12-16
Multi-piece electrode aperture 2017-1-19 2018-9-17
High throughput serial wafer handling end station 2016-12-27 2020-11-10 2020-11-10
Low conductance self-shielding insulator for ion implantation systems 2016-12-07 2021-11-11 2021-11-11
Ion source liner having a lip for ion implantation systems 2016-12-05 2022-6-11 2022-6-11
System for semiconductor wafer retention and sensing in a vacuum load lock 2016-11-28 2020-2-25 2020-2-25
Ion source liner having a lip for ion implantation systems 2016-11-04 2018-5-22 2018-5-22
Cam actuated filament clamp 2016-8-09 2020-10-01 2020-10-01
High throughput cooled ion implantation system and method 2016-8-04 2020-12-01 2020-12-01
Integrated extraction electrode manipulator for ion source 2016-3-24 2016-12-01
Bipolar wafer charge monitor system and ion implantation system comprising same 2016-2-25 2017-2-01
Systems and methods for beam angle adjustment in ion implanters with beam … 2015-12-28 2016-6-30
Beam profiling speed enhancement for scanned beam implanters 2015-12-28 2016-6-30
Wafer holder detection based on vibration or acoustic characteristic analysis 2015-12-28 2017-8-18
Combine multi-pole magnet and dipole scanning magnet 2015-12-28 2017-8-29
Combined electrostatic lens system for ion implantation 2015-12-28 2017-9-06
Measuring method of vertical beam profile in ion implantation system with … 2015-12-28 2020-5-27 2020-5-27
System and method to improve productivity of hybrid scan ion beam implanters 2015-12-28 2017-7-18 2017-7-18
System and method for electrostatic clamping of workpieces 2015-9-18 2016-7-01
Ion implantation source with textured interior surfaces 2015-6-02 2016-3-01
Ion implantation system and method for ion implantation 2015-4-30 2019-3-21 2019-3-21
Ion implantation system and method with variable energy control 2015-3-06 2016-1-28
Variable electrode pattern for versatile electrostatic clamp operation 2015-2-10 2015-9-16
Electrostatic clamp with constant mass flow multi-level coolant path 2015-2-10 2019-1-11 2019-1-11
Multi fluid cooling system for large temperature range chuck 2015-2-10 2015-11-01
イオン注入システムにおける注入角度を補正するための方法、およびイオン注入システム 2018-6-13 2022-10-17 2022-10-17