| Hydraulic feed system for an ion source |
2023-1-30 |
2023-8-03 |
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| High incidence angle graphite for particle control with dedicated low sputter … |
2022-12-20 |
2023-7-27 |
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| Shielded gas inlet for an ion source |
2022-10-28 |
2023-5-04 |
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| Charge filter magnet with variable achromaticity |
2022-10-27 |
2023-5-04 |
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| Method and apparatus for continuous chained energy ion implantation |
2022-8-05 |
2023-2-09 |
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| Blended energy ion implantation |
2022-8-05 |
2023-5-16 |
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| Extended lifetime dual indirectly-heated cathode ion source |
2022-7-29 |
2023-4-16 |
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| Phosphine co-gas for carbon implantation |
2022-7-06 |
2022-9-21 |
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| Ion source with multiple bias electrodes |
2022-5-11 |
2023-3-01 |
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| Hybrid high-temperature electrostatic clamp for improved workpiece temperature … |
2021-11-11 |
2022-6-01 |
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| Fluorine based molecular co-gas when running dimethylaluminum chloride as a … |
2021-11-01 |
2022-8-01 |
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| Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam |
2021-9-10 |
2022-5-01 |
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| Active workpiece heating or cooling for an ion implantation system |
2021-8-04 |
2021-11-25 |
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| Hydrogen co-generation using chloride ion source materials |
2021-7-12 |
2023-3-14 |
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| Stepped indirectly heated cathode with improved shielding |
2021-6-16 |
2021-12-23 |
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| Tuning apparatus for minimum divergence ion beam |
2021-6-16 |
2022-1-01 |
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| Ion source repeller |
2021-4-06 |
2022-10-06 |
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| Apparatus and method for controlling metal contamination of ion implantation … |
2021-2-08 |
2022-10-12 |
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| Hydrogen generator for an ion implanter |
2020-11-20 |
2022-3-15 |
2022-3-15 |
| Method of enhancing the energy and beam current on rf based implanter |
2020-8-18 |
2021-4-01 |
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| Toxic outgas control post process |
2020-7-10 |
2021-5-16 |
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| System and method for extending a lifetime of an ion source for molecular … |
2020-6-03 |
2021-4-01 |
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| Charge stripping for ion implantation systems |
2020-5-29 |
2020-12-03 |
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| High power wafer cooling |
2020-4-30 |
2021-2-16 |
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| Source with multiple arc chambers |
2020-4-16 |
2021-11-23 |
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| Liquid metal ion source |
2020-3-20 |
2021-3-01 |
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| Method of mixing upstream and downstream current measurements for inference of … |
2020-2-17 |
2021-10-21 |
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| Scan and corrector magnet designs for high throughput scanned beam ion … |
2019-12-19 |
2021-6-15 |
2021-6-15 |
| Reduction of condensed gases on chamber walls via purge gas dilution and … |
2019-12-10 |
2021-1-01 |
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| Reduction of condensed gases on chamber walls via heated chamber housing for … |
2019-12-09 |
2020-12-16 |
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| Tetrode extraction apparatus for ion source |
2019-12-04 |
2020-11-16 |
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| Wafer soak temperature readback and control via thermocouple embedded end … |
2019-11-18 |
2020-10-16 |
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| Ion source with tailored extraction aperture |
2019-11-12 |
2020-10-01 |
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| A system and method of arc detection using dynamic threshold |
2019-11-11 |
2020-7-01 |
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| Voltage modulation of the extraction electrode assembly in an ion implantation … |
2019-10-18 |
2021-9-08 |
2021-9-08 |
| Substrate support having customizable and replaceable features for enhanced … |
2019-8-23 |
2020-2-27 |
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| Systems and methods for aligning light-transmitting birefringence workpieces |
2019-8-23 |
2021-12-16 |
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| Scanning magnet design with improved efficiency |
2019-8-21 |
2021-3-26 |
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| Hydrogen bleed gas for an ion source housing |
2019-5-13 |
2019-11-14 |
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| In-situ wafer temperature measurement and control |
2019-4-01 |
2020-10-13 |
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| Outgassing impact on process chamber reduction via chamber pump and purge |
2019-1-30 |
2019-10-16 |
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| Method for decreasing cool down time with heated system for semiconductor … |
2018-12-21 |
2020-6-25 |
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| Method of providing consistent electrostatic clamping through real-time control … |
2018-12-04 |
2020-7-29 |
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| Film stabilization through novel materials modification of beamline components |
2018-11-16 |
2019-5-16 |
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| Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner … |
2018-10-25 |
2019-7-16 |
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| Systems and methods for in situ stabilization or removal of beamline film in … |
2018-10-09 |
2020-12-17 |
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| Wafer temperature control with consideration to beam power input |
2018-9-19 |
2020-4-01 |
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| Wafer temperature control with control over beam power input |
2018-9-18 |
2020-11-26 |
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| Rf resonator for ion beam acceleration |
2018-9-12 |
2019-3-21 |
|
| Lanthanated tungsten ion source and beamline componets |
2018-8-14 |
2018-12-13 |
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| Low conductance self-shielding insulator for ion implantation systems |
2018-8-10 |
2018-12-06 |
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| Ion implantation system having beam angle control in drift and deceleration … |
2018-6-15 |
2023-4-01 |
2023-4-01 |
| An ion implantation system, a method for implanting aluminum ions into a … |
2018-6-05 |
2022-12-01 |
2022-12-01 |
| Wafer cooling method |
2018-4-12 |
2018-8-16 |
|
| Two-axis variable width mass resolving aperture with fast acting shutter motion |
2018-3-01 |
2019-9-05 |
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| Radiant heating presoak |
2018-1-18 |
2018-7-26 |
|
| Phosphorous trifluoride co-gas for carbon implants |
2017-11-21 |
2018-10-01 |
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| Adjustable circumference electrostatic clamp |
2017-9-30 |
2021-7-11 |
2021-7-11 |
| In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge … |
2017-9-29 |
2022-3-01 |
2022-3-01 |
| An ion implantation system and a gripper mechanism for individually gripping a … |
2017-9-21 |
2022-3-01 |
2022-3-01 |
| Integrated emissivity sensor alignment characterization |
2017-9-21 |
2021-8-11 |
2021-8-11 |
| Ion implantation systems and methods for controlling ion beam uniformity |
2017-9-07 |
2022-4-01 |
2022-4-01 |
| System and method for heated ion implantation achieving high processing … |
2017-7-03 |
2017-12-21 |
|
| Implantation with solid aluminum iodide (ALI3) to generate aluminum atomic ions … |
2017-6-21 |
2019-9-05 |
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| Improved ion source repeller shield |
2017-4-05 |
2018-1-01 |
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| Multi-piece electrode aperture |
2017-1-19 |
2018-9-17 |
|
| Improved ion source cathode shield |
2017-1-19 |
2020-12-16 |
2020-12-16 |
| High throughput serial wafer handling end station |
2016-12-27 |
2017-6-22 |
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| Low conductance self-shielding insulator for ion implantation systems |
2016-12-07 |
2018-7-01 |
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| Ion source liner having a lip for ion implantation systems |
2016-12-05 |
2022-6-11 |
2022-6-11 |
| System for semiconductor wafer retention and sensing in a vacuum load lock |
2016-11-28 |
2020-2-25 |
2020-2-25 |
| Ion source liner having a lip for ion implantation systems |
2016-11-04 |
2018-5-22 |
2018-5-22 |
| Cam actuated filament clamp |
2016-8-09 |
2017-6-16 |
|
| High throughput cooled ion implantation system and method |
2016-8-04 |
2017-7-16 |
|
| Integrated extraction electrode manipulator for ion source |
2016-3-24 |
2020-9-01 |
2020-9-01 |
| Bipolar wafer charge monitor system and ion implantation system comprising same |
2016-2-25 |
2019-12-11 |
2019-12-11 |
| Determine that speed is lifted for scanning the beam profile of beam implanter |
2015-12-28 |
2017-9-26 |
|
| Combine multi-pole magnet and dipole scanning magnet |
2015-12-28 |
2017-8-29 |
|
| Combined electrostatic lens system for ion implantation |
2015-12-28 |
2017-9-06 |
|
| Wafer chucking detection based on vibration or acoustic characteristic analysis |
2015-12-28 |
2020-10-30 |
2020-10-30 |
| System and method for beam angle adjustment in an ion implanter with beam … |
2015-12-28 |
2017-12-28 |
|
| System and method to improve productivity of hybrid scan ion beam implanters |
2015-12-28 |
2016-6-30 |
|
| Method for measuring vertical beam profile in an ion implantation system with a … |
2015-12-28 |
2018-3-01 |
|
| System and method for electrostatic clamping of workpieces |
2015-9-18 |
2019-4-01 |
2019-4-01 |