| Wafer carrier assembly with pedestal and cover restraint arrangements that … |
2022-8-29 |
2023-3-09 |
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| Rotating Disk Reactor with Split Substrate Carrier |
2022-4-11 |
2022-8-04 |
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| Ion beam deposition of a low resistivity metal |
2021-9-14 |
2021-12-30 |
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| Reactor with Centering Pin for Epitaxial Deposition |
2021-8-27 |
2022-3-03 |
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| Ion beam deposition of a low resistivity metal |
2021-3-18 |
2021-12-16 |
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| An apparatus and method for die stack flux removal |
2020-12-18 |
2021-7-16 |
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| An apparatus and method for the minimization of undercut during a ubm etch … |
2020-11-06 |
2021-9-16 |
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| Molecular beam epitaxy systems with variable substrate-to-source arrangements |
2020-10-19 |
2021-8-01 |
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| Enhanced cathodic arc source for arc plasma deposition |
2020-8-19 |
2021-6-10 |
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| Melt detection systems and methods of using the same |
2020-6-30 |
2022-8-16 |
2022-8-16 |
| Deposition system with integrated carrier cleaning modules |
2020-5-08 |
2020-11-12 |
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| CVD Reactor Single Substrate Carrier and Rotating Tube for Stable Rotation |
2020-5-06 |
2021-4-01 |
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| Automated batch production thin film deposition system and method of use … |
2020-2-19 |
2021-10-01 |
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| Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for … |
2020-1-26 |
2020-8-06 |
|
| Apparatus and method for the minimization of undercut during a UBM etch process |
2019-11-15 |
2021-7-20 |
2021-7-20 |
| Semiconductor wafer processing chamber |
2019-10-17 |
2020-5-21 |
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| System and method for metrology using multiple measurement techniques |
2019-9-06 |
2020-3-11 |
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| Nanoscale dynamic mechanical analysis (AFM-NDMA) via atomic force microscope |
2019-8-02 |
2022-8-30 |
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| Micro-LED Transfer Methods Using Light-Based Debonding |
2019-7-24 |
2019-12-26 |
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| Self-Centering Wafer Carrier System for Chemical Vapor Deposition |
2019-7-17 |
2019-11-28 |
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| High-efficiency line-forming optical systems and methods using a serrated … |
2019-7-15 |
2022-8-16 |
2022-8-16 |
| Micro-LED transfer methods using light-based debonding |
2019-6-21 |
2020-2-01 |
|
| An apparatus and method for the minimization of undercut during a ubm etch … |
2019-6-20 |
2021-4-28 |
|
| System and method for self-cleaning wet treatment process |
2019-6-19 |
2020-1-09 |
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| Apparatus for supporting and maneuvering wafers |
2019-6-14 |
2019-12-19 |
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| High pressure spray head |
2019-6-07 |
2019-12-19 |
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| Plasma Enhanced ALD System |
2019-6-03 |
2019-9-19 |
|
| Chemical vapor depsotition equipment with multizone injector block |
2019-4-15 |
2019-10-25 |
|
| Wafer processing system and circulation expander for the same |
2019-4-02 |
2020-4-07 |
2020-4-07 |
| Wafer processing system with flow extension |
2019-4-02 |
2019-5-03 |
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| Wafer carrier having thermal cover for chemical vapor deposition |
2019-3-26 |
2019-10-16 |
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| Plasma bridge averager for ion beam milling |
2019-2-20 |
2019-8-27 |
|
| Apparatus and Method for Mixing Fluids with Degradational Properties |
2019-2-08 |
2019-6-06 |
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| Mid-filament spacer |
2019-1-14 |
2019-11-21 |
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| Heating wire intermediate spacer and heating subsystem for chemical vapor … |
2019-1-14 |
2019-12-17 |
2019-12-17 |
| Mid-filament spacers |
2019-1-11 |
2019-5-15 |
|
| Wafer carrier having retention pockets with compound radii for chemical vapor … |
2018-11-30 |
2019-6-06 |
|
| Wafer carrier having thermal cover for chemical vapor deposition systems |
2018-11-15 |
2019-5-23 |
|
| Dispensing arm head having point of dispense recirculation mode |
2018-11-02 |
2019-5-09 |
|
| The method that filter cell for chip processing assembly, the chip comprising … |
2018-8-24 |
2019-4-02 |
|
| Laser annealing systems and methods with ultra-short dwell times |
2018-8-21 |
2020-11-24 |
2020-11-24 |
| Chemical vapor deposition wafer carriers |
2018-8-21 |
2020-2-27 |
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| Chemical vapor deposition wafer carriers |
2018-8-20 |
2020-2-20 |
|
| The system and method based on laser of the melt processed of metal layer in … |
2018-7-27 |
2019-2-05 |
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| Chemical vapor deposition flow inlet elements and methods |
2018-7-03 |
2018-11-08 |
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| System and method for performing a wet etching process |
2018-6-08 |
2018-10-11 |
|
| Alkyl push flow for vertical flow rotating disk reactors |
2018-4-24 |
2019-7-30 |
2019-7-30 |
| Configurable high temperature chuck for use in a semiconductor wafer processing … |
2018-4-23 |
2018-10-25 |
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| Semiconductor wafer processing chamber |
2018-4-23 |
2018-10-25 |
|
| Wafer processing with carrier extension |
2018-4-06 |
2018-8-16 |
|
| Method and Apparatus for Forming Device Quality Gallium Nitride Layers on … |
2018-4-02 |
2018-8-09 |
|
| Laser-assisted atomic layer deposition of 2D metal chalcogenide films |
2018-3-29 |
2020-6-09 |
2020-6-09 |
| Apparatus and method for wafer thinning in advanced packaging applications |
2018-2-23 |
2020-1-21 |
2020-1-21 |
| Chuck systems and methods having enhanced electrical isolation for substrate- … |
2018-1-25 |
2022-1-01 |
2022-1-01 |
| Apparatus and method to remove solids from material lift off post process … |
2018-1-18 |
2019-9-17 |
2019-9-17 |
| Wafer carrier |
2017-12-29 |
2018-10-01 |
|
| Wafer carrier with a 33-pocket configuration |
2017-12-29 |
2018-1-15 |
|
| Chip carrier |
2017-12-29 |
2019-6-14 |
2019-6-14 |
| Scanning Methods For Focus Control For Lithographic Processing Of Reconstituted … |
2017-12-07 |
2018-6-14 |
|
| Wafer Chuck Apparatus With Contractible Sealing Devices For Securing Warped … |
2017-12-07 |
2018-6-14 |
|
| Thickness uniformity control for epitaxially-grown structures in a chemical … |
2017-11-22 |
2018-8-16 |
|
| Wafer chuck apparatus with micro-channel regions |
2017-11-02 |
2022-2-21 |
2022-2-21 |
| Infrared spectrum method and device of atomic force microscope for chemical … |
2017-10-18 |
2023-2-03 |
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| Seal for wafer processing assembly |
2017-10-10 |
2019-8-14 |
|
| Two-level tape frame rinse assembly |
2017-8-07 |
2020-2-11 |
2020-2-11 |
| Ion beam etching |
2017-6-16 |
2017-12-29 |
|
| Central source delivery for chemical vapor deposition systems |
2017-6-05 |
2017-12-21 |
|
| Ion sources and methods for generating ion beams with controllable ion current … |
2017-5-29 |
2017-12-11 |
|
| Formation of heteroepitaxial layers with rapid thermal processing to remove … |
2017-5-18 |
2018-10-02 |
2018-10-02 |
| Ion beam materials processing system with grid short clearing system for … |
2017-5-11 |
2017-11-16 |
|
| Collection chamber apparatus to separate multiple fluids during the … |
2017-4-25 |
2017-10-12 |
|
| An apparatus and method to control etch rate through adaptive spiking of … |
2017-4-03 |
2019-11-13 |
|
| Apparatus and method to control properties of fluid discharge via refrigerative … |
2017-3-29 |
2019-10-15 |
2019-10-15 |
| Keyed wafer carrier |
2017-3-21 |
2017-7-06 |
|
| Apparatuses for determining gas concentration |
2017-3-14 |
2018-1-16 |
|
| The reactor used for the method for operating chemical vapour deposition (CVD) … |
2017-3-02 |
2017-9-12 |
|
| Wafer handling assembly |
2017-2-23 |
2017-10-16 |
|
| High-efficiency line-forming optical systems and methods for defect annealing … |
2017-2-20 |
2017-7-18 |
2017-7-18 |
| Wafer carrier having thermal uniformity-enhancing features |
2017-1-11 |
2017-5-04 |
|
| Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition |
2016-12-16 |
2017-4-06 |
|
| Systems and methods of characterizing process-induced wafer shape for process … |
2016-11-29 |
2017-6-08 |
|
| Stress control on thin silicon substrates |
2016-11-28 |
2019-6-19 |
|
| Ion beam etching of STT-RAM structures |
2016-10-27 |
2018-6-11 |
|
| Methods of forming an ALD-inhibiting layer using a self-assembled monolayer |
2016-10-21 |
2017-5-03 |
|
| Deposition of thick magnetizable films for magnetic devices |
2016-10-10 |
2017-1-26 |
|
| Plasma atomic layer deposition system and method |
2016-9-27 |
2017-1-19 |
|
| Planetary wafer carriers |
2016-9-15 |
2017-3-16 |
|
| Multi -chambered chemical vapor deposition system |
2016-8-31 |
2017-4-26 |
2017-4-26 |
| Methods and systems for in-situ pyrometer calibration |
2016-8-22 |
2017-1-26 |
|
| Process-specific wafer carrier correction to improve thermal uniformity in … |
2016-8-18 |
2017-6-01 |
|
| Silicon germanium heterojunction bipolar transistor structure and method |
2016-8-13 |
2016-12-01 |
|
| Method and apparatus for controlled dopant incorporation and activation in a … |
2016-7-28 |
2017-4-16 |
|
| Pressure-adjusting lapping element |
2016-7-28 |
2016-10-03 |
|
| Masking methods for ALD processes for electrode-based devices |
2016-7-19 |
2017-2-01 |
|
| Self-centering wafer carrier system for chemical vapor deposition |
2016-6-10 |
2016-12-29 |
|
| Wafer carrier with a 14-pocket configuration |
2016-6-08 |
2016-12-21 |
|
| Wafer carrier with a 31-pocket configuration |
2016-6-08 |
2017-3-11 |
|
| Wafer carrier with a multi-pocket configuration |
2016-6-08 |
2017-3-11 |
|
| Stress control for heteroepitaxy |
2016-6-02 |
2017-2-01 |
|
| Micro chamber laser-processing system and the method using the process gas … |
2016-6-02 |
2016-12-21 |
|