| Microelectromechanical resonator |
2022-6-23 |
2022-10-20 |
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| Stacked-die mems resonator |
2022-5-27 |
2022-11-10 |
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| Ovenized mems |
2022-5-25 |
2022-11-10 |
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| Frequency-modulating sensor array |
2022-4-02 |
2023-3-21 |
2023-3-21 |
| Clock generator with dual-path temperature compensation |
2021-12-07 |
2022-12-13 |
2022-12-13 |
| Mems cavity with non-contaminating seal |
2021-12-06 |
2022-5-26 |
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| Microelectromechanical resonator |
2021-7-14 |
2021-10-28 |
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| Temperature stable MEMS resonator |
2021-6-30 |
2022-10-11 |
2022-10-11 |
| Resonator electrode shields |
2021-5-14 |
2023-1-03 |
2023-1-03 |
| Low Allan-Deviation oscillator |
2021-3-12 |
2022-5-03 |
2022-5-03 |
| Phase locked loop with phase error signal used to control effective impedance |
2021-3-11 |
2022-1-18 |
2022-1-18 |
| Bonding process with inhibited oxide formation |
2020-12-30 |
2022-11-01 |
2022-11-01 |
| Piezo-actuated mems resonator |
2020-12-08 |
2021-5-27 |
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| Capacitor-referenced temperature sensing |
2020-10-29 |
2022-1-18 |
2022-1-18 |
| Temperature-reporting oscillator |
2020-10-01 |
2022-2-08 |
2022-2-08 |
| Encapsulated microelectromechanical structure |
2020-8-03 |
2021-7-22 |
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| MEMS with over-voltage protection |
2020-6-29 |
2022-4-26 |
2022-4-26 |
| MEMS resonator |
2020-4-29 |
2023-2-21 |
2023-2-21 |
| Fixed-beacon time transfer system |
2019-10-17 |
2022-1-04 |
2022-1-04 |
| Micromachined thermistor |
2019-9-10 |
2023-1-03 |
2023-1-03 |
| Temperature sensor based on ratio of clock signals from respective MEMS … |
2019-3-04 |
2020-4-14 |
2020-4-14 |
| MEMS with small-molecule barricade |
2018-2-02 |
2020-10-13 |
2020-10-13 |
| Dual-resonator semiconductor die |
2017-9-06 |
2019-11-12 |
2019-11-12 |
| A three-dimensional imaging apparatus for modeling a colored three-dimensional … |
2016-6-02 |
2018-10-18 |
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| Temperature insensitive resonant elements and oscillators and methods of … |
2013-2-04 |
2017-7-04 |
2017-7-04 |
| Analyzing jitter with noise from the measurement environment |
2012-4-30 |
2014-11-18 |
2014-11-18 |
| Resonator Electrode Shields |
2010-10-04 |
2011-1-27 |
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| Analyzing jitter in a clock timing signal |
2010-5-18 |
2013-6-25 |
2013-6-25 |
| Dynamic temperature compensation for a digitally controlled oscillator using … |
2007-9-12 |
2009-6-09 |
2009-6-09 |
| Microelectromechanical oscillator with intermittent drive |
2007-8-30 |
2008-3-20 |
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| Ground strap for suppressing stiction during MEMS fabrication |
2007-6-28 |
2009-6-09 |
2009-6-09 |
| Temperature measurement system having a plurality of microelectromechanical … |
2007-6-14 |
2008-9-04 |
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| Backside release and/or encapsulation of microelectromechanical structures and … |
2007-5-21 |
2008-11-27 |
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| Microelectromechanical multi-stage oscillator |
2007-5-03 |
2008-12-24 |
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| Oscillator system having a plurality of microelectromechanical resonators and … |
2007-3-22 |
2007-12-16 |
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| Serrated mems resonators |
2006-12-20 |
2008-6-26 |
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| Serrated MEMS resonators |
2006-12-20 |
2009-6-09 |
2009-6-09 |
| Serrated MEMS resonators |
2006-12-20 |
2009-6-09 |
2009-6-09 |
| Precision capacitor array |
2006-11-29 |
2008-7-22 |
2008-7-22 |
| Microelectromechanical oscillator having temperature measurement system, and … |
2006-7-26 |
2008-11-04 |
2008-11-04 |