| Switched Capacitor Modulator |
2022-11-23 |
2023-3-23 |
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| Apparatus And Tuning Method For Mitigating RF Load Impedance Variations Due To … |
2022-11-02 |
2023-2-16 |
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| System and method for adjusting optical data to account for variations … |
2022-9-13 |
2023-3-16 |
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| Plasma ignition device and method with self-resonant device |
2022-9-12 |
2022-11-18 |
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| Multi-wavelength ozone concentration sensor and method of use |
2022-9-12 |
2023-3-30 |
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| Plasma source and a method for manufacturing thereof |
2022-8-07 |
2022-10-01 |
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| Hybrid high-power and broadband variable impedance modules |
2022-8-05 |
2023-2-16 |
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| Method and apparatus for impedance matching in a power delivery system for … |
2022-8-02 |
2023-2-23 |
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| Method and apparatus for plasma generation |
2022-7-26 |
2023-2-09 |
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| System and method for generating conductive liquid comprising deionized water … |
2022-6-07 |
2022-8-23 |
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| Methods and apparatus for pressure based mass flow ratio control |
2022-6-06 |
2022-12-15 |
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| Light-enhanced ozone wafer processing system and method of use |
2022-6-02 |
2022-12-08 |
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| Spectrometer |
2022-4-18 |
2023-3-09 |
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| Gas analyzer system with ion source |
2022-4-18 |
2022-6-01 |
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| Adaptive pulse shaping with post match sensor |
2022-4-11 |
2023-2-16 |
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| Microwave magnetron with constant anodic impedance and systems using the same |
2022-3-31 |
2022-6-01 |
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| Microwave system for microwave-assisted surface chemistry annealing of ald … |
2022-2-02 |
2022-8-11 |
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| Multi-Sensor Gas Sampling Detection System for Radical Gases and Short-Lived … |
2022-1-25 |
2022-7-07 |
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| Load-lock gauge |
2022-1-20 |
2022-7-28 |
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| Piecewise rf power system and method for supplying pre-distorted rf bias … |
2021-12-21 |
2022-4-12 |
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| Monitoring radical particle concentration using mass spectrometry |
2021-12-21 |
2022-9-16 |
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| Intermodulation Distortion Mitigation Using Electronic Variable Capacitor |
2021-12-13 |
2022-3-31 |
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| Method and Apparatus for Pulse Gas Delivery with Pressure Control |
2021-11-18 |
2022-5-26 |
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| Thermal conductivity gauge |
2021-11-10 |
2022-9-16 |
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| System and method of power generation with phase linked solid-state generator … |
2021-11-10 |
2022-1-01 |
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| Pressure control using an external trigger |
2021-11-02 |
2022-9-01 |
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| Systems and methods for generating a dissolved ammonia solution with reduced … |
2021-10-05 |
2021-12-01 |
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| High Speed Synchronization Of Plasma Source/Bias Power Delivery |
2021-9-21 |
2022-1-06 |
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| Endpoint detection of deposition cleaning in a pumping line and a processing … |
2021-8-05 |
2022-2-17 |
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| Pulsed, bidirectional radio frequency source/load |
2021-7-07 |
2021-11-25 |
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| GaN Clamp with Uniform Pressure |
2021-7-01 |
2023-1-05 |
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| Laser processing apparatus, methods of laser-processing workpieces and related … |
2021-6-22 |
2021-10-14 |
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| Phased array steering for laser beam positioning systems |
2021-5-21 |
2021-9-23 |
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| Cooling and compression clamp for short lead power devices |
2021-5-17 |
2022-12-20 |
2022-12-20 |
| Plasma Source Having a Dielectric Plasma Chamber with Improved Plasma … |
2021-4-22 |
2021-8-05 |
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| Adaptive control for a power generator |
2021-4-16 |
2022-12-20 |
2022-12-20 |
| Valve apparatuses and related methods for reactive process gas isolation and … |
2021-4-15 |
2022-4-01 |
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| Capacitance manometer |
2021-3-05 |
2021-10-16 |
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| Ozonated water delivery system and method of use |
2021-2-26 |
2021-4-29 |
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| Laser-seeding for electro-conductive plating |
2021-2-25 |
2022-8-25 |
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| Solid state microwave oscillator and power amplifier |
2021-2-24 |
2021-7-08 |
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| System and method for arc detection using a bias rf generator signal |
2021-2-24 |
2023-4-05 |
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| Methods and apparatus for pressure based mass flow ratio control |
2021-2-19 |
2022-5-16 |
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| Method and apparatus for pressure-based mass flow rate control |
2021-2-11 |
2023-4-14 |
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| Integrated rf power supply single input multiple output control for operation … |
2021-2-03 |
2021-5-13 |
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| Method and apparatus for pulse gas delivery with concentration measurement |
2021-1-12 |
2021-10-01 |
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| Solid-state impedance matching system including hybrid tuning network with … |
2020-12-23 |
2021-4-01 |
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| Polymer composite vacuum components |
2020-12-11 |
2022-6-21 |
2022-6-21 |
| Method and apparatus for deposition cleaning in a pumping line |
2020-11-30 |
2022-6-21 |
2022-6-21 |
| Thermal Conductivity Gauge |
2020-11-20 |
2021-7-08 |
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| Low wavefront distortion optical mount for thin optical components |
2020-10-14 |
2021-4-29 |
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| Multi-Axis Motion System with Decoupled Wafer Chuck Support and Methods of Use … |
2020-9-10 |
2022-3-10 |
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| Reduced impedance variation in a modular 2-terminal terminal contacting … |
2020-9-09 |
2022-9-22 |
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| Microwave applicator with solid-state generator power source |
2020-8-14 |
2021-1-07 |
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| Laser System Having A Multi-Stage Amplifier and Methods of Use |
2020-8-13 |
2020-11-26 |
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| Method and apparatus for improving sheath formation, evolution, and pulse-to- … |
2020-8-12 |
2022-4-11 |
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| Nano-textured attenuator for use with laser beam profiling and laser beam … |
2020-6-20 |
2021-3-16 |
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| Adaptive Periodic Waveform Controller |
2020-6-18 |
2021-1-14 |
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| Method and Apparatus for Pulse Gas Delivery Using an External Pressure Trigger |
2020-6-10 |
2020-9-24 |
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| Laser processing apparatus, methods of operating the same, and methods of … |
2020-5-29 |
2022-6-02 |
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| Polygonal toroidal plasma source |
2020-5-07 |
2020-11-12 |
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| Extremum seeking control device and automatic frequency tuning method for radio … |
2020-4-27 |
2022-5-03 |
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| Plasma rf bias erasing system |
2020-4-27 |
2020-8-27 |
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| Heated throttle valve apparatus and methods of use and manufacture |
2020-4-22 |
2021-2-16 |
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| Multi-axis machine tool and methods of controlling the same |
2020-4-21 |
2021-11-30 |
2021-11-30 |
| Feedback control by rf waveform tailoring for ion energy distribution |
2020-4-14 |
2020-8-27 |
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| Method and apparatus for pulse gas delivery |
2020-3-31 |
2021-2-16 |
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| Low profile heater apparatus and method of manufacture |
2020-3-27 |
2020-11-01 |
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| Multi-dispersive spectrometer |
2020-3-25 |
2022-2-09 |
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| System and method for performing real time monitoring of flow rate of mass flow … |
2020-3-13 |
2020-6-25 |
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| High-speed pulse gas feeding system and method |
2020-3-04 |
2020-7-16 |
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| Phased-array beam steering for materials processing |
2020-2-04 |
2021-12-02 |
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| Low repetition rate infrared tunable femtosecond laser source |
2020-1-31 |
2021-12-08 |
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| Laser-processing apparatus, methods of operating the same, and methods of … |
2020-1-03 |
2022-2-17 |
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| Predictive diagnostics systems and methods using vacuum pressure control valves |
2019-12-23 |
2020-4-23 |
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| Robust Ion Source |
2019-12-13 |
2020-4-16 |
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| High-Power Mode-Locked Laser System and Methods of Use |
2019-12-12 |
2020-4-16 |
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| Power converter control apparatus and method for high stability and power … |
2019-12-11 |
2020-8-06 |
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| Apparatus and method for ignition of a plasma system and for monitoring health … |
2019-11-13 |
2020-3-26 |
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| Resonant transmission line for delivering precise rf voltage |
2019-11-08 |
2022-1-13 |
2022-1-13 |
| Method and apparatus for immersion grating lithography |
2019-11-01 |
2020-5-21 |
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| Impedance matching network model based correction scheme and performance … |
2019-10-17 |
2021-8-25 |
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| Frame and exterior shrouding for laser processing system |
2019-10-15 |
2021-11-11 |
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| Systems and methods for use in handling components |
2019-10-14 |
2021-10-28 |
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| System and method for monitoring rate of flow through mass flow controller in … |
2019-10-11 |
2020-2-13 |
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| Systems and methods for drilling vias in transparent materials |
2019-10-02 |
2021-8-12 |
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| Laser processing systems and methods for beam dithering and skiving |
2019-8-30 |
2019-12-19 |
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| Multi-Junction Detector Device and Method of Manufacture |
2019-8-28 |
2019-12-19 |
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| System, method, and apparatus for optical hydrocarbon gas composition … |
2019-7-26 |
2019-12-19 |
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| Acousto-optic deflector applications in laser processing of dielectric or other … |
2019-7-08 |
2019-10-31 |
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| Protective oxide coating with reduced metal concentrations |
2019-7-02 |
2019-9-26 |
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| Apparatus and method for thermal insulation of high-temperature pressure … |
2019-6-26 |
2020-5-16 |
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| Radical output monitor for a remote plasma source and method of use |
2019-6-13 |
2020-5-01 |
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| Laser-processing apparatus, methods of operating the same, and methods of … |
2019-6-04 |
2021-11-25 |
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| Gas analysis with an inverted magnetron source |
2019-5-24 |
2020-1-16 |
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| Actively cooled vacuum isolation valve |
2019-5-10 |
2021-7-06 |
2021-7-06 |
| Method and apparatus for partial pressure detection |
2019-5-07 |
2019-12-16 |
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| Laser micromachining with tailored bursts of short laser pulses |
2019-5-01 |
2019-10-03 |
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| Methods and apparatus for multiple channel mass flow and ratio control systems |
2019-4-30 |
2019-12-16 |
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| Apparatus and method for controlling ion energy distribution in process plasmas |
2019-4-09 |
2020-1-16 |
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