| In-situ process chamber chuck cleaning by cleaning substrate |
2023-5-01 |
2023-8-24 |
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| Sensor module for scanning electron microscopy applications |
2023-3-20 |
2023-7-20 |
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| Self-calibrating overlay metrology |
2023-3-07 |
2023-7-13 |
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| Automated Focusing System For Tracking Specimen Surface with a Configurable … |
2023-2-27 |
2023-6-29 |
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| Electrochemical analysis of metallic depolarizers in gold electrodeposition |
2023-2-22 |
2023-9-07 |
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| System and method to weight defects with co-located modeled faults |
2023-2-22 |
2023-9-07 |
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| Parallax method for a single-cell diffraction based measurement of … |
2023-2-09 |
2023-8-17 |
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| Cleanroom compatible robotic end effector exchange system |
2023-1-31 |
2023-8-10 |
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| System for automatic diagnostics and monitoring of semiconductor defect die … |
2023-1-13 |
2023-8-03 |
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| Frequency Conversion Using Interdigitated Nonlinear Crystal Gratings |
2022-12-22 |
2023-5-25 |
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| System and method for monitoring parameters of a semiconductor factory … |
2022-12-22 |
2023-4-20 |
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| Supercritical fluid cleaning for components in optical or electron beam systems |
2022-12-19 |
2023-6-29 |
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| Learnable defect detection for semiconductor applications |
2022-12-11 |
2023-4-20 |
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| Reduction or elimination of pattern placement error in metrology measurements |
2022-12-06 |
2023-3-30 |
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| Deep ultraviolet laser using strontium tetraborate for frequency conversion |
2022-11-29 |
2023-6-15 |
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| Methods and systems for data driven parameterization and measurement of … |
2022-11-29 |
2023-6-08 |
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| 3D Microscope Including Insertable Components To Provide Multiple Imaging And … |
2022-11-28 |
2023-3-23 |
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| Frequency conversion using stacked strontium tetraborate plates |
2022-11-23 |
2023-1-01 |
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| Image alignment setup for specimens with intra- and inter-specimen variations … |
2022-11-23 |
2023-1-01 |
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| Process window qualification modulation layouts |
2022-11-09 |
2023-6-15 |
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| Systems and methods for uniform cooling of electromagnetic coil |
2022-10-28 |
2023-5-16 |
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| Detection and Correction of System Responses in Real-Time |
2022-10-24 |
2023-2-09 |
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| Training a machine learning model to generate higher resolution images from … |
2022-10-19 |
2022-12-01 |
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| Moiré scatterometry overlay |
2022-10-19 |
2023-5-04 |
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| Method and apparatus for positioning optical isolator assembly with replaceable … |
2022-10-18 |
2023-5-16 |
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| Systems and methods for setting up a physics-based model |
2022-10-09 |
2023-4-20 |
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| System and method for focus control in extreme ultraviolet lithography systems … |
2022-10-03 |
2023-2-02 |
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| Electron beam system for inspection and review of 3d devices |
2022-10-03 |
2022-12-01 |
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| Unsupervised or self-supervised deep learning for semiconductor-based … |
2022-10-03 |
2023-4-13 |
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| Back-illuminated sensor and a method of manufacturing a sensor using a silicon … |
2022-10-02 |
2022-12-01 |
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| Soft x-ray optics with improved filtering |
2022-10-02 |
2022-12-01 |
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| Panel design to improve accurate defect location report |
2022-9-28 |
2023-5-18 |
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| Explosion relief valve with annular flame arrestor |
2022-9-22 |
2023-1-19 |
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| Systems and methods of creating multiple electron beams |
2022-9-15 |
2023-4-06 |
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| A method for determining material parameters of a multilayer test sample |
2022-9-09 |
2023-3-16 |
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| Single Cell In-Die Metrology Targets and Measurement Methods |
2022-9-09 |
2023-1-05 |
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| Quick swap chuck with vacuum holding interchangeable top plate |
2022-8-29 |
2023-3-09 |
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| Parallel scatterometry overlay metrology |
2022-8-19 |
2023-3-02 |
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| Conical pocket laser-sustained plasma lamp |
2022-8-18 |
2023-4-25 |
2023-4-25 |
| Swirler for laser-sustained plasma light source with reverse vortex flow |
2022-8-12 |
2023-2-16 |
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| Spring mechanism for self-lock and centering during loading |
2022-8-09 |
2023-2-16 |
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| Laser-sustained plasma lamps with graded concentration of hydroxyl radical |
2022-8-03 |
2023-2-16 |
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| Protective coating for nonlinear optical crystal |
2022-7-29 |
2023-5-01 |
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| System and method for optimizing through silicon via overlay |
2022-7-27 |
2023-2-02 |
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| Laser sustained plasma light source with high pressure flow |
2022-7-20 |
2022-9-01 |
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| Micro stigmator array for multi-electron beam system |
2022-7-20 |
2022-9-01 |
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| System and method for identifying latent reliability defects in semiconductor … |
2022-7-19 |
2022-9-01 |
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| System and method for semiconductor device print check alignment |
2022-7-19 |
2022-9-01 |
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| Sensitive particle detection with spatially-varying polarization rotator and … |
2022-7-18 |
2022-9-01 |
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| System and method for detecting particle contamination on a bonding tool |
2022-7-12 |
2023-2-02 |
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| Light modulated electron source |
2022-7-06 |
2023-8-01 |
2023-8-01 |
| Defect detection for multi-die masks |
2022-7-05 |
2023-4-16 |
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| Methods of boric acid analysis and process control of metallization solutions |
2022-7-05 |
2023-2-09 |
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| Setting up care areas for inspection of a specimen |
2022-7-05 |
2023-1-12 |
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| Methods and systems for overlay measurement based on soft x-ray scatterometry |
2022-7-03 |
2022-9-01 |
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| Advanced in-line part average testing |
2022-7-03 |
2022-9-01 |
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| Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology |
2022-7-01 |
2022-11-03 |
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| Cold-field-emitter electron gun with self-cleaning extractor using reversed e- … |
2022-6-30 |
2023-1-16 |
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| Method and System for Providing a Quality Metric for Improved Process Control |
2022-6-27 |
2023-2-16 |
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| System and method of fiber location mapping in a multi-beam system |
2022-6-24 |
2023-1-05 |
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| Machine Learning for Metrology Measurements |
2022-6-21 |
2022-10-06 |
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| Overlay mark design for electron beam overlay |
2022-6-16 |
2023-1-05 |
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| Method of fabricating a high-pressure laser-sustained-plasma lamp |
2022-6-16 |
2023-4-01 |
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| Image contrast metrics for deriving and improving imaging conditions |
2022-6-15 |
2022-12-22 |
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| Overlay design for electron beam and scatterometry overlay measurements |
2022-6-15 |
2023-1-05 |
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| Segmented multi-channel backside illuminated solid state detector with through- … |
2022-6-03 |
2022-12-15 |
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| Detection aided two-stage phase unwrapping on pattern wafer geometry … |
2022-6-02 |
2022-12-08 |
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| System and method for z-pat defect-guided statistical outlier detection of … |
2022-6-02 |
2022-12-15 |
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| Systems and methods for semiconductor defect-guided burn-in and system level … |
2022-6-01 |
2022-12-15 |
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| Single-Material Waveplates for Pupil Polarization Filtering |
2022-5-31 |
2023-6-15 |
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| Deep learning image denoising for semiconductor-based applications |
2022-5-31 |
2022-12-08 |
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| System and method for defining flexible regions on a sample during inspection |
2022-5-23 |
2022-7-01 |
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| Finding semiconductor defects using convolutional context attributes |
2022-5-08 |
2022-7-01 |
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| Electrostatic substrate cleaning system and method |
2022-5-06 |
2022-11-10 |
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| Oblique illumination for overlay metrology |
2022-5-04 |
2023-1-16 |
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| Clustering sub-care areas based on noise characteristics |
2022-5-03 |
2022-7-01 |
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| Integrated multi-tool reticle inspection |
2022-5-03 |
2022-7-01 |
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| High throughput multi-electron beam system |
2022-4-29 |
2022-11-17 |
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| Deep generative model-based alignment for semiconductor applications |
2022-4-29 |
2022-11-10 |
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| Mitigating thermal expansion mismatch in temperature probe construction … |
2022-4-26 |
2022-11-03 |
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| Process Temperature Measurement Device Fabrication Techniques and Methods of … |
2022-4-26 |
2022-12-15 |
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| Measurement of stitching error using split targets |
2022-4-25 |
2023-9-07 |
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| Laser-sustained plasma light source with reverse vortex flow |
2022-4-22 |
2023-2-16 |
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| System and method for lateral shearing interferometry in an inspection tool |
2022-4-21 |
2022-10-27 |
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| Systems and methods for absolute sample positioning |
2022-4-20 |
2023-4-16 |
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| Adaptive modeling misregistration measurement system and method |
2022-4-19 |
2022-12-08 |
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| Design-assisted inspection for dram and 3d nand devices |
2022-4-18 |
2022-8-04 |
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| Full Beam Metrology For X-Ray Scatterometry Systems |
2022-4-18 |
2022-8-25 |
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| Bbp assisted defect detection flow for sem images |
2022-4-13 |
2022-6-01 |
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| On-product overlay targets |
2022-4-13 |
2023-2-01 |
|
| System and method for optical wafer characterization with image up-sampling |
2022-4-12 |
2022-12-01 |
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| Deep learning networks for nuisance filtering |
2022-4-11 |
2022-6-01 |
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| Salient feature point based image alignment |
2022-4-07 |
2022-12-01 |
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| Method and system for mixed mode wafer inspection |
2022-4-04 |
2022-7-21 |
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| Semantic image segmentation for semiconductor-based applications |
2022-4-01 |
2023-4-16 |
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| Edge profile inspection for delamination defects |
2022-4-01 |
2022-11-01 |
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| Frequency domain enhancement of low-snr flat residue/stain defects for … |
2022-3-27 |
2022-5-01 |
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| Tunable duv laser assembly |
2022-3-23 |
2022-12-15 |
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| Device-like metrology targets |
2022-3-08 |
2022-6-23 |
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| Method for measuring and correcting misregistration between layers in a … |
2022-3-07 |
2022-6-23 |
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