| Substrate carrier |
2023-1-26 |
2023-4-11 |
|
| Substrate alignment method and apparatus |
2023-1-10 |
2023-4-11 |
|
| METHOD AND APPARATUS FOR HEALTH EVALUATION OF CONVEYOR |
2022-12-27 |
2023-4-11 |
|
| Substrate processing equipment |
2022-12-23 |
2023-3-14 |
|
| Substrate processing device and substrate transfer device |
2022-12-23 |
2023-3-10 |
|
| Substrate transfer section |
2022-12-02 |
2023-2-14 |
|
| Seal switched reluctance motor |
2022-10-13 |
2022-12-20 |
|
| Simulacrum labware substitutes and methods therefor |
2022-8-12 |
2023-2-16 |
|
| Substrate transport apparatus |
2022-8-10 |
2022-10-19 |
|
| Automated Cryogenic Storage System |
2022-7-13 |
2023-3-02 |
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| Sealed robot drive |
2022-6-22 |
2022-8-30 |
|
| Sample tube and method |
2022-5-24 |
2022-7-27 |
|
| Method and apparatus for health assessment of a transport apparatus |
2022-5-24 |
2023-1-19 |
|
| Test Tube Capping And De-Capping Apparatus |
2022-5-12 |
2022-9-01 |
|
| Sample tube and rack to reduce ice formation on barcode |
2022-4-29 |
2022-11-10 |
|
| Sample storage and extraction system |
2022-4-28 |
2022-7-20 |
|
| Method and apparatus for substrate alignment |
2022-4-05 |
2022-10-20 |
|
| Substrate transport apparatus |
2022-3-15 |
2022-8-25 |
|
| Capping And De-Capping Apparatus And A Method Of Operating Such An Apparatus |
2022-2-03 |
2022-6-09 |
|
| Tube holding microplate |
2022-2-02 |
2022-4-12 |
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| Position feedback for sealed environment |
2021-12-28 |
2022-4-12 |
|
| Automated Vault Module |
2021-12-07 |
2022-3-31 |
|
| Substrate processing apparatus |
2021-12-07 |
2022-5-26 |
|
| Substrate processing apparatus |
2021-12-07 |
2022-6-02 |
|
| Consumption medium replenishment station |
2021-12-02 |
2022-2-16 |
|
| Method and apparatus for brushless electrical machine control |
2021-11-23 |
2022-5-19 |
|
| On the fly automatic wafer centering method and apparatus |
2021-7-21 |
2021-10-28 |
|
| Substrate mapping apparatus and method therefor |
2021-6-29 |
2021-12-30 |
|
| Substrate transport apparatus with independent accessory feedthrough |
2021-6-01 |
2021-9-23 |
|
| Transport apparatus and process apparatus |
2021-4-01 |
2021-7-26 |
|
| Substrate transport apparatus |
2021-1-22 |
2022-2-01 |
2022-2-01 |
| Vessel gripper |
2021-1-20 |
2022-11-30 |
|
| Tube sealer |
2020-12-23 |
2021-11-23 |
2021-11-23 |
| Substrate processing apparatus |
2020-12-02 |
2022-10-12 |
|
| Modular sample store |
2020-11-17 |
2021-5-20 |
|
| Semiconductor processing tool |
2020-10-30 |
2021-2-18 |
|
| Substrate processing apparatus |
2020-9-17 |
2021-1-28 |
|
| Tool auto-teach method and apparatus |
2020-9-08 |
2022-10-11 |
2022-10-11 |
| Cryogenic temperature freezer |
2020-9-02 |
2021-1-14 |
|
| Wafer aligner |
2020-8-07 |
2020-11-19 |
|
| Substrate transfer device with multiple movable arms utilizing mechanical … |
2020-8-04 |
2020-11-19 |
|
| robotic implantable vision device |
2020-7-30 |
2022-12-09 |
|
| Substrate processing system |
2020-7-02 |
2020-10-15 |
|
| Automated system for storing, retrieving and managing samples |
2020-6-30 |
2020-10-22 |
|
| Substrate process apparatus |
2020-6-15 |
2022-4-20 |
|
| Semiconductor workpiece processing system |
2020-6-03 |
2020-10-08 |
|
| Method of operation for transport arm of substrate of substrate processing … |
2020-2-19 |
2020-6-11 |
|
| Substrate transfer device |
2020-2-06 |
2020-5-14 |
|
| Tray engine and methods for transferring trays to and from tools and in sorters |
2020-1-10 |
2020-4-23 |
|
| Substrate transport apparatus |
2019-11-28 |
2020-4-02 |
|
| Load port module |
2019-11-26 |
2022-1-19 |
|
| Load port module |
2019-11-26 |
2022-1-26 |
|
| Conveyor equipment with linear bearings and methods for doing so |
2019-10-31 |
2022-1-17 |
|
| Substrate transfer system, substrate processing apparatus, and substrate … |
2019-9-19 |
2020-1-16 |
|
| Processing device including on-the-fly substrate centering |
2019-8-23 |
2019-12-19 |
|
| Substrate processing device, substrate carrier, and substrate processing system |
2019-8-05 |
2019-11-14 |
|
| Semiconductor component processing system |
2019-7-26 |
2019-10-31 |
|
| Board transfer device |
2019-5-31 |
2021-9-27 |
|
| Method of carrying-in and carrying-out substrate and substrate conveying … |
2019-4-04 |
2019-8-29 |
|
| Method for controlling supply of helium refrigerant in cryogenic refrigeration … |
2019-3-27 |
2019-6-20 |
|
| Board transfer device |
2019-3-18 |
2021-11-11 |
|
| Automated cryogenic storage and retrieval system |
2019-3-15 |
2021-1-27 |
|
| Compact and efficient system and method for warming cryogenic heat exchanger … |
2019-2-01 |
2019-4-25 |
|
| Automatic wafer centering method and equipment |
2019-1-29 |
2021-5-13 |
|
| Substrate transport apparatus |
2018-11-20 |
2020-5-21 |
|
| Transport device and adapter pendant |
2018-7-09 |
2020-8-31 |
|
| Storage system |
2018-5-16 |
2018-8-23 |
|
| Access allocation system and operation method for semiconductor manufacturing … |
2018-4-20 |
2018-8-02 |
|
| Method and apparatus for transporting substrates |
2018-2-07 |
2020-2-27 |
|
| A capping and de-capping apparatus and a method of operating such an apparatus |
2018-2-05 |
2019-12-04 |
|
| Method and apparatus for position compensation of a substrate transfer device |
2018-1-26 |
2020-2-20 |
|
| Workpiece parallel processing device |
2017-11-22 |
2018-2-22 |
|
| Method and device for compensation for dimensional variations in low … |
2017-10-17 |
2020-8-11 |
2020-8-11 |
| Automatic positioning substrate transfer apparatus |
2017-9-14 |
2017-12-21 |
|
| Substrate processing equipment |
2017-7-07 |
2019-9-12 |
|
| Sample selector |
2017-4-25 |
2018-10-16 |
2018-10-16 |
| Ventilation assisted passive cell freezing device |
2017-1-03 |
2017-6-29 |
|
| Coaxial drive vacuum robot |
2016-12-27 |
2017-7-13 |
|
| Substrate processing apparatus with motors integrated with chamber walls |
2016-11-04 |
2017-1-26 |
|
| Cryopump |
2016-10-24 |
2017-1-19 |
|
| Load lock fast pump vent |
2016-10-24 |
2018-4-26 |
|
| On the fly automatic wafer centering method and apparatus |
2016-7-13 |
2018-7-04 |
|
| Reduced capacity carrier, carrier machine, load port, buffer device system |
2016-4-26 |
2016-9-29 |
|
| Turn-Secure Rack |
2016-2-05 |
2018-1-25 |
|
| System for cryogenic cooling |
2015-9-24 |
2015-12-17 |
|
| Method And Apparatus For Providing Temperature Control To A Cryopump |
2015-9-11 |
2016-3-10 |
|
| Port door positioning apparatus and associated methods |
2015-4-10 |
2015-7-09 |
|
| Integrated system interacting with container storage system for substrate |
2015-4-02 |
2015-8-13 |
|
| Portable cryogenic workstation |
2015-1-20 |
2016-11-30 |
|
| Substrate transportation device accompanying a plurality of independent movable … |
2014-11-04 |
2015-3-19 |
|
| Substrate processing apparatus |
2014-10-17 |
2015-3-05 |
|
| Extended read range rfid system |
2014-10-10 |
2015-1-29 |
|
| Cryogenic refrigerator utilizing linear drive |
2014-10-09 |
2015-1-08 |
|
| Robot driving device having magnetic spindle bearing |
2014-10-03 |
2015-2-26 |
|
| Substrate loading device |
2014-8-04 |
2014-12-04 |
|
| Device and method for removing a peelable seal |
2014-6-26 |
2018-2-20 |
2018-2-20 |
| Substrate handling system for aligning and orienting substrates during a … |
2013-11-25 |
2015-5-28 |
|
| Semiconductor manufacturing device |
2013-10-25 |
2014-4-03 |
|
| High-speed substrate arrangement apparatus |
2013-9-02 |
2014-1-23 |
|
| Wafer center detection |
2013-5-28 |
2013-11-14 |
|