| Pellicle for flat panel display photomask |
2021-8-12 |
2021-12-16 |
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| Pellicle removal tool |
2021-7-30 |
2021-12-09 |
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| System, method, and program product for manufacturing a photomask |
2021-4-30 |
2023-3-08 |
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| Microfluidic thermoptic energy processor |
2016-3-30 |
2016-7-21 |
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| Grayscale lithography of photo definable glass |
2014-3-14 |
2015-4-09 |
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| Mixer chip |
2013-3-14 |
2014-5-29 |
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| Photomask having a reduced field size and method of using the same |
2010-6-22 |
2011-4-14 |
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| Photomask with detector for optimizing an integrated circuit production process … |
2010-3-19 |
2011-3-22 |
2011-3-22 |
| Photomask having a reduced field size and method of using the same |
2009-6-17 |
2015-4-14 |
2015-4-14 |
| Secure photomask with blocking aperture |
2008-4-18 |
2008-10-23 |
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| Security element for an integrated circuit, integrated circuit including the … |
2008-4-18 |
2012-1-24 |
2012-1-24 |
| Photomask with detector for optimizing an integrated circuit production process … |
2008-4-18 |
2008-10-23 |
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| Optical sensor and method for making same |
2007-9-17 |
2008-3-27 |
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| Binary half tone photomasks and microscopic three-dimensional devices and … |
2006-5-24 |
2006-9-21 |
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| Automated manufacturing system and method for processing photomasks |
2005-7-08 |
2005-11-03 |
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| Comprehensive front end method and system for automatically generating and … |
2005-6-24 |
2006-5-16 |
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| Method of forming a semiconductor layer using a photomask reticle having … |
2005-6-14 |
2006-6-16 |
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| Rule based system and method for automatically generating photomask orders |
2005-6-07 |
2006-4-01 |
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| Comprehensive front end method and system for automatically generating and … |
2005-6-01 |
2007-10-26 |
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| System and method for automatic generating and/or processing a photomask order … |
2005-6-01 |
2008-6-30 |
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| Rule based system and method for automatically generating photomask orders |
2005-5-31 |
2007-8-22 |
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| System and method for automatically generating a tooling specification using a … |
2005-5-25 |
2006-6-16 |
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| Rule based system and method for automatically generating photomask orders |
2005-5-20 |
2007-8-31 |
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| Embedded attenuated phase shift mask with tunable transmission |
2005-3-18 |
2005-11-01 |
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| Alternating aperture phase shift photomask having light absorption layer |
2004-12-28 |
2008-3-18 |
2008-3-18 |
| Rule based system and method for automatically generating photomask orders in a … |
2004-10-27 |
2005-3-17 |
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| Photomask having an internal substantially transparent etch stop layer |
2004-9-09 |
2005-4-21 |
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| Photomask having an internal substantially transparent etch stop layer |
2004-9-09 |
2005-4-16 |
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| Method of repairing a photomask having an internal etch stop layer |
2004-9-08 |
2006-3-09 |
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| Rule based system and method for automatically generating photomask orders by … |
2004-6-25 |
2010-2-23 |
2010-2-23 |
| Photomask reticle having multiple versions of the same mask pattern with … |
2004-6-14 |
2005-12-15 |
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| Fused silica pellicle in intimate contact with the surface of a photomask |
2003-12-11 |
2004-6-24 |
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| Endpoint detection of plasma-assisted etch process |
2003-8-20 |
2005-2-24 |
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| Improved photomask having an intermediate inspection film layer |
2003-7-18 |
2005-5-21 |
2005-5-21 |
| Method for fabricating chirped fiber Bragg gratings |
2003-2-19 |
2005-3-15 |
2005-3-15 |
| Fused silica pellicle |
2002-12-18 |
2004-2-03 |
2004-2-03 |
| Pattern compensation techniques for charged particle lithographic masks |
2002-12-04 |
2006-6-27 |
2006-6-27 |
| Alternating aperture phase shift photomask having plasma etched isotropic … |
2002-11-05 |
2004-5-06 |
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| Process and apparatus for minimizing thermal gradients across an advanced … |
2002-9-17 |
2004-3-18 |
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| Integrated cooling substrate for extreme ultraviolet reticle |
2002-7-15 |
2004-10-19 |
2004-10-19 |
| EUVL mask structure and method of formation |
2002-7-10 |
2004-8-17 |
2004-8-17 |
| Binary half tone photomasks and microscopic three-dimensional devices and … |
2002-1-23 |
2003-7-24 |
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| Fused silica pellicle |
2002-1-18 |
2002-7-30 |
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| Tangle resistance pet tie device |
2001-2-02 |
2002-6-25 |
2002-6-25 |
| Electrical critical dimension measurements on photomasks |
2001-1-31 |
2002-8-01 |
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| Information storage on masks for microlithographic tools |
2001-1-26 |
2002-8-01 |
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| Step mask |
2001-1-05 |
2002-9-12 |
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| Thin tantalum silicon composite film formation and annealing for use as … |
2000-12-21 |
2002-8-22 |
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| Method of defining and forming membrane regions in a substrate for stencil or … |
2000-11-07 |
2003-10-21 |
2003-10-21 |
| Substrate for diamond stencil mask and method for forming |
2000-11-07 |
2003-3-04 |
2003-3-04 |